Growth and optical studies of boron nitride films on silicon substrates

Growth and optical studies of boron nitride films on silicon substrates

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... by an Advanced Energy 650 watt RF power supply (Model RFX-600) to an autotuning network (Advanced Energy, Model ... Microwave power (2.45 GHz) is supplied to the ECR source by a 250 watt Astex power supply through a manual anbsp;...


Title:Growth and optical studies of boron nitride films on silicon substrates
Author: Charles Albert Taylor
Publisher: - 1996
ISBN-13:

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